Vacuum Helium Detection Process Description:
A. The operator places the workpiece in a vacuum chamber, manually closes the vacuum chamber door and presses the start button;
B. The chamber is vacuumed automatically, workpiece gross leakage is detected the by measuring the total amount of air during the process of vacuum chamber evacuation: if there is gross leakage, alarm will be given out; if there is no gross leakage, following process will be continued;
C. Vacuum chamber is vacuumed to the set degree;
D. Helium signal in the vacuum chamber will be detected automatically;
E. Fine leakage of the workpiece will be automatically determined:
If the leak detector finds that there is a helium signal exceeding the set value in the vacuum chamber, it indicates that the workpiece has a fine leak, and the fine leakage indicator light on the operation interface is on. The operator presses the confirmation button on the operation panel, the chamber door is opened automatically, the workpiece is unloaded, workpiece is placed in unqualified area;
If the leak detector does not find a helium signal exceeding the set value in the vacuum chamber, it indicates that the workpiece has passed the fine leakage test, the qualified indicator on the operation interface is on, the chamber door is manually opened, the workpiece is unloaded, and the workpiece is placed in the qualified area.
This equipment adopts INFICON oil-free vacuum pump to exclude the contamination of leaked parts with oil vapor.
Technical Parameters: (will be customized according to client's requirements)
|Workpiece||High Precision workpiece|
|Leak detection accuracy||9.0E-11Pa.m3/sec.|
|Vacuum Chamber QTY||1 (can be customized)